Morphological characterization and porosity profiles of tantalum glancing-angle-deposited thin films
<p>Glancing angle deposition (GLAD) is a physical vapor deposition (PVD) process using a substrate that rotates tilted at an angle to the evaporation source. Depending on the deposition conditions, it provides the controlled formation of regular nanostructures during the PVD process. As a res...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2020-02-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://www.j-sens-sens-syst.net/9/79/2020/jsss-9-79-2020.pdf |