Laser-induced fluorescence analysis of plasmas for epitaxial growth of YBiO3 films with pulsed laser deposition

We record the two-dimensional laser-induced fluorescence (LIF) on multiple plasma constituents in a YBiO3 plasma. This allows us to directly link the influence of oxygen present in the background gas during pulsed laser deposition to the oxidation of plasma species as well as the formation of epitax...

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Bibliographic Details
Main Authors: Kasper Orsel, Rik Groenen, Bert Bastiaens, Gertjan Koster, Guus Rijnders, Klaus-J. Boller
Format: Article
Language:English
Published: AIP Publishing LLC 2016-12-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/1.4971349