Optical Properties of TiO2 Grown by Atomic Layer Deposition Using Various Oxidizing Agents: The Ellipsometry Analysis of Absorption Properties

Optical Properties of TiO2 Grown by Atomic Layer Deposition Using Various Oxidizing Agents: The Ellipsometry Analysis of Absorption Properties

Abstract This study analyzes the optical properties of TiO2 films grown via atomic layer deposition (ALD) using Tetrakis(dimethylamino)titanium with oxidizing agents such as H2O, H2O2, O3, and O2‐plasma. TiO2‐H2O exhibited Ti3+ states and oxygen vacancies characteristic of black TiO2, enhancing visi...

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Bibliographic Details
Main Authors: Jorge Luis Vazquez‐Arce, Tibor Suta, Bálint Fodor, László Makai, Oscar Contreras, Amin Bahrami, Kornelius Nielsch, Hugo Tiznado
Format: Article
Language:English
Published: Wiley-VCH 2024-09-01
Series:Advanced Materials Interfaces
Subjects:
atomic layer deposition
black TiO2
optical properties
spectroscopic ellipsometry
thin films
Online Access:https://doi.org/10.1002/admi.202400269

Internet

https://doi.org/10.1002/admi.202400269

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