Direct-write polymer nanolithography in ultra-high vacuum
Polymer nanostructures were directly written onto substrates in ultra-high vacuum. The polymer ink was coated onto atomic force microscope (AFM) probes that could be heated to control the ink viscosity. Then, the ink-coated probes were placed into an ultra-high vacuum (UHV) AFM and used to write pol...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2012-01-01
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Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.3.6 |