A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer

A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer

In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-heater, and Pt interdigitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation occurs on the heated WO3 sensing layer. This cause...

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Bibliographic Details
Main Authors: Lung-Ming Fu, Chia-Yen Lee, Mu-Tsun Lee, Ming-Tsun Ke
Format: Article
Language:English
Published: MDPI AG 2009-04-01
Series:Sensors
Subjects:
benzene
gas sensor
MEMS
micro-heater
WO3 thin film
Online Access:http://www.mdpi.com/1424-8220/9/4/2895/

Internet

http://www.mdpi.com/1424-8220/9/4/2895/

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