Application of X-ray diffraction and reflectometry methods for analysis of damaged layers on polar faces of ZnO after surface chemical-mechanical treatment
ZnO single crystals are used for the fabrication of laser targets for high-energy electron irradiated UV laser cathode-ray tubes and homoepitaxial substrates for lasers. The technology of ZnO based UV LEDs imposes strict requirements to surface quality. Chemical-mechanical polishing delivers good su...
Main Authors: | , |
---|---|
Format: | Article |
Language: | English |
Published: |
Pensoft Publishers
2022-04-01
|
Series: | Modern Electronic Materials |
Online Access: | https://moem.pensoft.net/article/84257/download/pdf/ |