Application of X-ray diffraction and reflectometry methods for analysis of damaged layers on polar faces of ZnO after surface chemical-mechanical treatment
ZnO single crystals are used for the fabrication of laser targets for high-energy electron irradiated UV laser cathode-ray tubes and homoepitaxial substrates for lasers. The technology of ZnO based UV LEDs imposes strict requirements to surface quality. Chemical-mechanical polishing delivers good su...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Pensoft Publishers
2022-04-01
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| Series: | Modern Electronic Materials |
| Online Access: | https://moem.pensoft.net/article/84257/download/pdf/ |