Preparation of HfNbTiTaZr Thin Films by Ionized Jet Deposition Method
The ionized jet deposition (IJD) method is applied to the preparation of thin films composed of refractory HfNbTiTaZr high-entropy alloy (HEA). Due to its stoichiometric reliability, the IJD method provides a flexible tool for deposition of complex multi-element materials, such as HEAs. Scanning ele...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-03-01
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Series: | Crystals |
Subjects: | |
Online Access: | https://www.mdpi.com/2073-4352/13/4/580 |