Preparation of HfNbTiTaZr Thin Films by Ionized Jet Deposition Method

Preparation of HfNbTiTaZr Thin Films by Ionized Jet Deposition Method

The ionized jet deposition (IJD) method is applied to the preparation of thin films composed of refractory HfNbTiTaZr high-entropy alloy (HEA). Due to its stoichiometric reliability, the IJD method provides a flexible tool for deposition of complex multi-element materials, such as HEAs. Scanning ele...

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Bibliographic Details
Main Authors: Jakub Skočdopole, Jaroslav Čech, Jiří Čapek, Karel Trojan, Ladislav Kalvoda
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Crystals
Subjects:
thin films
preparation of
ionized jet deposition
high-entropy alloys
HfNbTiTaZr
Online Access:https://www.mdpi.com/2073-4352/13/4/580

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