Non-stationary volume-adsorption model for pumping of vacuum chambers
The non-stationary mathematical model of pumping of gas, located in the volume and adsorbed on the inner surface of vacuum chambers is considered. A feature of the model is the use of variation of adsorption heat with respect to the logarithm of the degree of coverage obtained from the Frendlich ads...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201824504007 |