Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions
Using a reduction of TRIM simulation data, the sputtering yield behaviour of Zinc target bombard by heavy Xenon ions plasma is studied. The sputtering yield as a function of Zinc layer width, Xenon ion number, energy of ions, and the angle of ion incidence are calculated and illustrated graphic...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
University of Baghdad
2017-03-01
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| Series: | Ibn Al-Haitham Journal for Pure and Applied Sciences |
| Subjects: | |
| Online Access: | https://jih.uobaghdad.edu.iq/index.php/j/article/view/89 |