Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions
Using a reduction of TRIM simulation data, the sputtering yield behaviour of Zinc target bombard by heavy Xenon ions plasma is studied. The sputtering yield as a function of Zinc layer width, Xenon ion number, energy of ions, and the angle of ion incidence are calculated and illustrated graphic...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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University of Baghdad
2017-03-01
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| Series: | Ibn Al-Haitham Journal for Pure and Applied Sciences |
| Subjects: | |
| Online Access: | https://jih.uobaghdad.edu.iq/index.php/j/article/view/89 |
| _version_ | 1817985080976474112 |
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| author | Samira A. Ebrahiem Firas M. Hady Mustafa K. Jassim Huda M. Tawfeek |
| author_facet | Samira A. Ebrahiem Firas M. Hady Mustafa K. Jassim Huda M. Tawfeek |
| author_sort | Samira A. Ebrahiem |
| collection | DOAJ |
| description |
Using a reduction of TRIM simulation data, the sputtering yield behaviour of Zinc target bombard by heavy Xenon ions plasma is studied. The sputtering yield as a function of Zinc layer width, Xenon ion number, energy of ions, and the angle of ion incidence are calculated and illustrated graphically. The corresponding energy loss due to ionization, vacancies and phonons, are graphically shown and discussed. Further, we fit the calculations and expressions for fitted curves are presented with its coefficients.
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| first_indexed | 2024-04-13T23:52:37Z |
| format | Article |
| id | doaj.art-5ab1940fed2e4a40ab766b538485281b |
| institution | Directory Open Access Journal |
| issn | 1609-4042 2521-3407 |
| language | English |
| last_indexed | 2024-04-13T23:52:37Z |
| publishDate | 2017-03-01 |
| publisher | University of Baghdad |
| record_format | Article |
| series | Ibn Al-Haitham Journal for Pure and Applied Sciences |
| spelling | doaj.art-5ab1940fed2e4a40ab766b538485281b2022-12-22T02:24:01ZengUniversity of BaghdadIbn Al-Haitham Journal for Pure and Applied Sciences1609-40422521-34072017-03-01292Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon IonsSamira A. EbrahiemFiras M. HadyMustafa K. JassimHuda M. Tawfeek Using a reduction of TRIM simulation data, the sputtering yield behaviour of Zinc target bombard by heavy Xenon ions plasma is studied. The sputtering yield as a function of Zinc layer width, Xenon ion number, energy of ions, and the angle of ion incidence are calculated and illustrated graphically. The corresponding energy loss due to ionization, vacancies and phonons, are graphically shown and discussed. Further, we fit the calculations and expressions for fitted curves are presented with its coefficients. https://jih.uobaghdad.edu.iq/index.php/j/article/view/89TRIM program, sputtering yield, Xenon ions, Zinc |
| spellingShingle | Samira A. Ebrahiem Firas M. Hady Mustafa K. Jassim Huda M. Tawfeek Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions Ibn Al-Haitham Journal for Pure and Applied Sciences TRIM program, sputtering yield, Xenon ions, Zinc |
| title | Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions |
| title_full | Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions |
| title_fullStr | Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions |
| title_full_unstemmed | Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions |
| title_short | Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions |
| title_sort | simulation study of sputtering yield of zn target bombarded by xenon ions |
| topic | TRIM program, sputtering yield, Xenon ions, Zinc |
| url | https://jih.uobaghdad.edu.iq/index.php/j/article/view/89 |
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