Detection of Paddle Vats in Wafer Images
Wafer dicing is a basic step in building electronic devices such as CPU or GPU. It is automatically accomplished in the wafer Dicing Machine in which a little misalignment of wafers may lead to damaged chips. The information of misalignment may be obtained by detecting the paddle vat to calculate th...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2012-12-01
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| Series: | Journal of Algorithms & Computational Technology |
| Online Access: | https://doi.org/10.1260/1748-3018.6.4.653 |