Design and Analysis of XY Large Travel Micro Stage Based on Secondary Symmetric Lever Amplification

Design and Analysis of XY Large Travel Micro Stage Based on Secondary Symmetric Lever Amplification

This study presents a newly developed piezoelectric drive mechanism for the purpose of designing, analyzing, and testing a micro-positioning platform driven by piezoelectric actuators. The platform incorporates a piezoelectric ceramic actuator and a flexible hinge drive and features a symmetrical tw...

Full description

Bibliographic Details
Main Authors: Tao Zhang, Liuguang Xiong, Zequan Pan, Chunhua Zhang, Wen Qu, Yuhang Wang, Chunmei Yang
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Micromachines
Subjects:
micromotion stage
PEAs
flexible structure
decoupled kinematics
Online Access:https://www.mdpi.com/2072-666X/14/9/1805

Internet

https://www.mdpi.com/2072-666X/14/9/1805

Similar Items