Surface Analysis by Secondary Ion Mass Spectrometry (SIMS): Principles and Applications from Swiss laboratories
Secondary Ion Mass Spectrometry (SIMS) extracts chemical, elemental, or isotopic information about a localized area of a solid target by performing mass spectrometry on secondary ions sputtered from its surface by the impact of a beam of charged particles. This primary beam sputters ionized atoms a...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | deu |
Published: |
Swiss Chemical Society
2022-02-01
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Series: | CHIMIA |
Subjects: | |
Online Access: | https://www.chimia.ch/chimia/article/view/698 |