Influence of Temperature and Incidence Angle on the Irradiation Cascade Effect of 6H-SiC: Molecular Dynamics Simulations

SiC devices have been typically subjected to extreme environments and complex stresses during operation, such as intense radiation and large diurnal amplitude differences on the lunar surface. Radiation displacement damage may lead to degradation or failure of the performance of semiconductor device...

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Bibliographic Details
Main Authors: Yaolin Chen, Hongxia Liu, Cong Yan, Hao Wei
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/11/2126