Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing su...

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Bibliographic Details
Main Authors: Inga Morkvenaite-Vilkonciene, Vytautas Bucinskas, Jurga Subaciute-Zemaitiene, Ernestas Sutinys, Darius Virzonis, Andrius Dzedzickis
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/8/1256