Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing su...

Full description

Bibliographic Details
Main Authors: Inga Morkvenaite-Vilkonciene, Vytautas Bucinskas, Jurga Subaciute-Zemaitiene, Ernestas Sutinys, Darius Virzonis, Andrius Dzedzickis
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/8/1256
_version_ 1797408845739327488
author Inga Morkvenaite-Vilkonciene
Vytautas Bucinskas
Jurga Subaciute-Zemaitiene
Ernestas Sutinys
Darius Virzonis
Andrius Dzedzickis
author_facet Inga Morkvenaite-Vilkonciene
Vytautas Bucinskas
Jurga Subaciute-Zemaitiene
Ernestas Sutinys
Darius Virzonis
Andrius Dzedzickis
author_sort Inga Morkvenaite-Vilkonciene
collection DOAJ
description The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing suitable methods. This paper provides an effort to classify electrostatic actuators and create a system in the variety of existing devices. Here is overviewed and classified a wide spectrum of electrostatic actuators developed in the last 5 years, including modeling of different designs, and their application in various devices. The paper provides examples of possible implementations, conclusions, and an extensive list of references.
first_indexed 2024-03-09T04:04:31Z
format Article
id doaj.art-5bac6474918a47a1857555305f1245fa
institution Directory Open Access Journal
issn 2072-666X
language English
last_indexed 2024-03-09T04:04:31Z
publishDate 2022-08-01
publisher MDPI AG
record_format Article
series Micromachines
spelling doaj.art-5bac6474918a47a1857555305f1245fa2023-12-03T14:08:00ZengMDPI AGMicromachines2072-666X2022-08-01138125610.3390/mi13081256Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and ApplicationsInga Morkvenaite-Vilkonciene0Vytautas Bucinskas1Jurga Subaciute-Zemaitiene2Ernestas Sutinys3Darius Virzonis4Andrius Dzedzickis5Department of Mechatronics, Robotics and Digital Manufacturing, Vilnius Gediminas Technical University, 10257 Vilnius, LithuaniaDepartment of Mechatronics, Robotics and Digital Manufacturing, Vilnius Gediminas Technical University, 10257 Vilnius, LithuaniaDepartment of Mechatronics, Robotics and Digital Manufacturing, Vilnius Gediminas Technical University, 10257 Vilnius, LithuaniaDepartment of Mechatronics, Robotics and Digital Manufacturing, Vilnius Gediminas Technical University, 10257 Vilnius, LithuaniaDepartment of Mechatronics, Robotics and Digital Manufacturing, Vilnius Gediminas Technical University, 10257 Vilnius, LithuaniaDepartment of Mechatronics, Robotics and Digital Manufacturing, Vilnius Gediminas Technical University, 10257 Vilnius, LithuaniaThe implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing suitable methods. This paper provides an effort to classify electrostatic actuators and create a system in the variety of existing devices. Here is overviewed and classified a wide spectrum of electrostatic actuators developed in the last 5 years, including modeling of different designs, and their application in various devices. The paper provides examples of possible implementations, conclusions, and an extensive list of references.https://www.mdpi.com/2072-666X/13/8/1256micrometric actuatorselectrostatic actuatorsconducting polymers
spellingShingle Inga Morkvenaite-Vilkonciene
Vytautas Bucinskas
Jurga Subaciute-Zemaitiene
Ernestas Sutinys
Darius Virzonis
Andrius Dzedzickis
Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
Micromachines
micrometric actuators
electrostatic actuators
conducting polymers
title Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
title_full Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
title_fullStr Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
title_full_unstemmed Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
title_short Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
title_sort development of electrostatic microactuators 5 year progress in modeling design and applications
topic micrometric actuators
electrostatic actuators
conducting polymers
url https://www.mdpi.com/2072-666X/13/8/1256
work_keys_str_mv AT ingamorkvenaitevilkonciene developmentofelectrostaticmicroactuators5yearprogressinmodelingdesignandapplications
AT vytautasbucinskas developmentofelectrostaticmicroactuators5yearprogressinmodelingdesignandapplications
AT jurgasubaciutezemaitiene developmentofelectrostaticmicroactuators5yearprogressinmodelingdesignandapplications
AT ernestassutinys developmentofelectrostaticmicroactuators5yearprogressinmodelingdesignandapplications
AT dariusvirzonis developmentofelectrostaticmicroactuators5yearprogressinmodelingdesignandapplications
AT andriusdzedzickis developmentofelectrostaticmicroactuators5yearprogressinmodelingdesignandapplications