Oxygen and nitrogen doped diamond-like carbon thin films: A comparative study
DLC films were deposited on Si substrates using direct ion beam deposition method, followed by investigating the influence of O2 and N2 doping on their electrical and structural properties. The films were doped with oxygen and nitrogen under flow rates of 5 and 40 sccm (standard cubic centimeters pe...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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Semnan University
2022-06-01
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| Series: | Progress in Physics of Applied Materials |
| Subjects: | |
| Online Access: | https://ppam.semnan.ac.ir/article_7275_d18b548c46779f00abd3cc80ae71b510.pdf |