Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors
An alignment-free sensing module for the positioning system based on tunneling magnetoresistive (TMR) sensors with an absolute-incremental-integrated scale is demonstrated. The sensors of the proposed system for both lines consist of identical layer stacks; therefore, all sensors can be fabricated i...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-06-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/12/4137 |