Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact m...

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Bibliographic Details
Main Authors: Nikolay Samotaev, Konstantin Oblov, Pavel Dzhumaev, Marco Fritsch, Sindy Mosch, Mykola Vinnichenko, Nikolai Trofimenko, Christoph Baumgärtner, Franz-Martin Fuchs, Lena Wissmeier
Format: Article
Language:English
Published: MDPI AG 2021-11-01
Series:Micromachines
Subjects:
laser micromachining
printing technology
platinum ink
thin ceramic membrane
Online Access:https://www.mdpi.com/2072-666X/12/12/1440

Internet

https://www.mdpi.com/2072-666X/12/12/1440

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