Design and Simulation of a Low Actuation Voltage Capacitive MEMS Switch
In this paper we have proposed a new switch or structure for reducing actuation voltage. This switch is compared with four conventional structures considering the force range of 1uN to 3uN. We have used the ANSYS software for design and simulation for the switch parameters such as actuation voltage,...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
OICC Press
2024-02-01
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| Series: | Majlesi Journal of Electrical Engineering |
| Subjects: | |
| Online Access: | https://oiccpress.com/mjee/article/view/5285 |