A Comparative Study on the Electrical Characteristics of Generating Plasma by Using Different Target Sources
In this research, the electrical characteristics of glow discharge plasma were studied. Glow discharge plasma generated in a home-made DC magnetron sputtering system, and a DC-power supply of high voltage as input to the discharge electrodes were both utilized. The distance between two electrodes is...
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| Format: | Article |
| Language: | Arabic |
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College of Science for Women, University of Baghdad
2018-12-01
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| Series: | Baghdad Science Journal |
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| Online Access: | http://bsj.uobaghdad.edu.iq/index.php/BSJ/article/view/37 |