NEAR INFRARED PHOTOLUMINESCENCE OF THE HYDROGENATED AMORPHOUS SILICON THIN FILMS WITH IN-SITU EMBEDDED SILICON NANOPARTICLES
The intrinsic hydrogenated silicone layers with embedded silicon nanoparticles were grown in-situ at 250°C on glass substrates by the radio frequency plasma enhanced chemical vapor deposition (CVD) from silane highly diluted in hydrogen. The changes in the optical absorption coefficient were detecte...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
University of Chemistry and Technology, Prague
2017-03-01
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| Series: | Ceramics-Silikáty |
| Subjects: | |
| Online Access: |
http://www.ceramics-silikaty.cz/index.php?page=cs_detail_doi&id=876
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