NEAR INFRARED PHOTOLUMINESCENCE OF THE HYDROGENATED AMORPHOUS SILICON THIN FILMS WITH IN-SITU EMBEDDED SILICON NANOPARTICLES

NEAR INFRARED PHOTOLUMINESCENCE OF THE HYDROGENATED AMORPHOUS SILICON THIN FILMS WITH IN-SITU EMBEDDED SILICON NANOPARTICLES

The intrinsic hydrogenated silicone layers with embedded silicon nanoparticles were grown in-situ at 250°C on glass substrates by the radio frequency plasma enhanced chemical vapor deposition (CVD) from silane highly diluted in hydrogen. The changes in the optical absorption coefficient were detecte...

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Bibliographic Details
Main Authors:	Z. Remes, J. Stuchlik, Purkrt A., Ledinsky M., Kupcik J.
Format:	Article
Language:	English
Published:	University of Chemistry and Technology, Prague 2017-03-01
Series:	Ceramics-Silikáty
Subjects:	Amorphous silicon Chemical vapor deposition Photothermal deflection spectroscopy
Online Access:	http://www.ceramics-silikaty.cz/index.php?page=cs_detail_doi&id=876

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