Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible <inline-formula><math display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula>
Film bulk acoustic resonators (FBARs) with a desired effective electromechanical coupling coefficient (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><m...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-11-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/12/2044 |
| _version_ | 1797456287925010432 |
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| author | Laixia Nian Yang Zou Chao Gao Yu Zhou Yuchen Fan Jian Wang Wenjuan Liu Yan Liu Jeffrey Bowoon Soon Yao Cai Chengliang Sun |
| author_facet | Laixia Nian Yang Zou Chao Gao Yu Zhou Yuchen Fan Jian Wang Wenjuan Liu Yan Liu Jeffrey Bowoon Soon Yao Cai Chengliang Sun |
| author_sort | Laixia Nian |
| collection | DOAJ |
| description | Film bulk acoustic resonators (FBARs) with a desired effective electromechanical coupling coefficient (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula>) are essential for designing filter devices. Using AlN/AlScN composite film with the adjustable thickness ratio can be a feasible approach to obtain the required <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula>. In this work, we research the resonant characteristics of FBARs based on AlN/AlScN composite films with different thickness ratios by finite element method and fabricate FBAR devices in a micro-electromechanical systems process. Benefiting from the large piezoelectric constants, with a 1 μm-thick Al<sub>0.8</sub>Sc<sub>0.2</sub>N film, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula> can be twice compared with that of FBAR based on pure AlN films. For the composite films with different thickness ratios, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula> can be adjusted in a relatively wide range. In this case, a filter with the specific N77 sub-band is demonstrated using AlN/Al<sub>0.8</sub>Sc<sub>0.2</sub>N composite film, which verifies the enormous potential for AlN/AlScN composite film in design filters. |
| first_indexed | 2024-03-09T16:05:05Z |
| format | Article |
| id | doaj.art-5cb9038f788b4770ba6938aacfa1ce46 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T16:05:05Z |
| publishDate | 2022-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-5cb9038f788b4770ba6938aacfa1ce462023-11-24T16:43:11ZengMDPI AGMicromachines2072-666X2022-11-011312204410.3390/mi13122044Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible <inline-formula><math display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula>Laixia Nian0Yang Zou1Chao Gao2Yu Zhou3Yuchen Fan4Jian Wang5Wenjuan Liu6Yan Liu7Jeffrey Bowoon Soon8Yao Cai9Chengliang Sun10The Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaSchool of Microelectronics, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaFilm bulk acoustic resonators (FBARs) with a desired effective electromechanical coupling coefficient (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula>) are essential for designing filter devices. Using AlN/AlScN composite film with the adjustable thickness ratio can be a feasible approach to obtain the required <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula>. In this work, we research the resonant characteristics of FBARs based on AlN/AlScN composite films with different thickness ratios by finite element method and fabricate FBAR devices in a micro-electromechanical systems process. Benefiting from the large piezoelectric constants, with a 1 μm-thick Al<sub>0.8</sub>Sc<sub>0.2</sub>N film, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula> can be twice compared with that of FBAR based on pure AlN films. For the composite films with different thickness ratios, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula> can be adjusted in a relatively wide range. In this case, a filter with the specific N77 sub-band is demonstrated using AlN/Al<sub>0.8</sub>Sc<sub>0.2</sub>N composite film, which verifies the enormous potential for AlN/AlScN composite film in design filters.https://www.mdpi.com/2072-666X/13/12/2044film bulk acoustic resonatoraluminum scandium nitridecomposite filmeffective electromechanical coupling coefficient |
| spellingShingle | Laixia Nian Yang Zou Chao Gao Yu Zhou Yuchen Fan Jian Wang Wenjuan Liu Yan Liu Jeffrey Bowoon Soon Yao Cai Chengliang Sun Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible <inline-formula><math display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula> Micromachines film bulk acoustic resonator aluminum scandium nitride composite film effective electromechanical coupling coefficient |
| title | Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible <inline-formula><math display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula> |
| title_full | Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible <inline-formula><math display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula> |
| title_fullStr | Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible <inline-formula><math display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula> |
| title_full_unstemmed | Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible <inline-formula><math display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula> |
| title_short | Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible <inline-formula><math display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula> |
| title_sort | demonstration of thin film bulk acoustic resonator based on aln alscn composite film with a feasible inline formula math display inline semantics mrow msubsup mi k mi mrow mi e mi mi f mi mi f mi mrow mn 2 mn msubsup mrow semantics math inline formula |
| topic | film bulk acoustic resonator aluminum scandium nitride composite film effective electromechanical coupling coefficient |
| url | https://www.mdpi.com/2072-666X/13/12/2044 |
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