Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible <inline-formula><math display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula>

Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible <inline-formula><math display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula>

Film bulk acoustic resonators (FBARs) with a desired effective electromechanical coupling coefficient (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><m...

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Bibliographic Details
Main Authors: Laixia Nian, Yang Zou, Chao Gao, Yu Zhou, Yuchen Fan, Jian Wang, Wenjuan Liu, Yan Liu, Jeffrey Bowoon Soon, Yao Cai, Chengliang Sun
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Micromachines
Subjects:
film bulk acoustic resonator
aluminum scandium nitride
composite film
effective electromechanical coupling coefficient
Online Access:https://www.mdpi.com/2072-666X/13/12/2044

Internet

https://www.mdpi.com/2072-666X/13/12/2044

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