Design of Capacitorless DRAM Based on Polycrystalline Silicon Nanotube Structure

In this study, a capacitorless one-transistor dynamic random-access memory (1T-DRAM) based on a polycrystalline silicon nanotube structure with a grain boundary (GB) is designed and analyzed using technology computer-aided design (TCAD) simulation. The proposed 1T-DRAM has the improved electrical pe...

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Main Authors: Jin Park, Min Su Cho, Sang Ho Lee, Hee Dae An, So Ra Min, Geon Uk Kim, Young Jun Yoon, Jae Hwa Seo, Sin-Hyung Lee, Jaewon Jang, Jin-Hyuk Bae, In Man Kang
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9641815/
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author Jin Park
Min Su Cho
Sang Ho Lee
Hee Dae An
So Ra Min
Geon Uk Kim
Young Jun Yoon
Jae Hwa Seo
Sin-Hyung Lee
Jaewon Jang
Jin-Hyuk Bae
In Man Kang
author_facet Jin Park
Min Su Cho
Sang Ho Lee
Hee Dae An
So Ra Min
Geon Uk Kim
Young Jun Yoon
Jae Hwa Seo
Sin-Hyung Lee
Jaewon Jang
Jin-Hyuk Bae
In Man Kang
author_sort Jin Park
collection DOAJ
description In this study, a capacitorless one-transistor dynamic random-access memory (1T-DRAM) based on a polycrystalline silicon nanotube structure with a grain boundary (GB) is designed and analyzed using technology computer-aided design (TCAD) simulation. The proposed 1T-DRAM has the improved electrical performances because the outer gate (OG) and the inner gate (IG) effectively control the charges in the channel and body regions. IG has an asymmetric structure with an underlap (<inline-formula> <tex-math notation="LaTeX">$L_{\mathrm {underlap}}$ </tex-math></inline-formula>) region to reduce the Shockley&#x2013;Read&#x2013;Hall (SRH) recombination rate. In the proposed 1T-DRAM, the write &#x201C;1&#x201D; operation is performed by band-to-band tunneling between the OG and the IG. The proposed 1T-DRAM cell exhibited a sensing margin of <inline-formula> <tex-math notation="LaTeX">$422 ~\mu \text{A}/\mu \text{m}$ </tex-math></inline-formula> and a retention time of 120 ms at <inline-formula> <tex-math notation="LaTeX">$T$ </tex-math></inline-formula> &#x003D; 358 K.
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spelling doaj.art-5ccd72a798794e9ea26e6f74c9a37d5d2022-12-21T18:45:05ZengIEEEIEEE Access2169-35362021-01-01916367516368510.1109/ACCESS.2021.31335729641815Design of Capacitorless DRAM Based on Polycrystalline Silicon Nanotube StructureJin Park0https://orcid.org/0000-0003-1742-7572Min Su Cho1https://orcid.org/0000-0002-9372-6796Sang Ho Lee2https://orcid.org/0000-0002-4954-3861Hee Dae An3So Ra Min4Geon Uk Kim5Young Jun Yoon6Jae Hwa Seo7Sin-Hyung Lee8https://orcid.org/0000-0002-8723-439XJaewon Jang9https://orcid.org/0000-0003-1908-0015Jin-Hyuk Bae10https://orcid.org/0000-0003-3217-1309In Man Kang11https://orcid.org/0000-0002-7726-9740School of Electronic and Electrical Engineering, Kyungpook National University, Daegu, South KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu, South KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu, South KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu, South KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu, South KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu, South KoreaKorea Multi-purpose Accelerator Complex, Korea Atomic Energy Research Institute, Gyeongju, Republic of KoreaPower Semiconductor Research Center, Korea Electrotechnology Research Institute, Changwon, Republic of KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu, South KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu, South KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu, South KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu, South KoreaIn this study, a capacitorless one-transistor dynamic random-access memory (1T-DRAM) based on a polycrystalline silicon nanotube structure with a grain boundary (GB) is designed and analyzed using technology computer-aided design (TCAD) simulation. The proposed 1T-DRAM has the improved electrical performances because the outer gate (OG) and the inner gate (IG) effectively control the charges in the channel and body regions. IG has an asymmetric structure with an underlap (<inline-formula> <tex-math notation="LaTeX">$L_{\mathrm {underlap}}$ </tex-math></inline-formula>) region to reduce the Shockley&#x2013;Read&#x2013;Hall (SRH) recombination rate. In the proposed 1T-DRAM, the write &#x201C;1&#x201D; operation is performed by band-to-band tunneling between the OG and the IG. The proposed 1T-DRAM cell exhibited a sensing margin of <inline-formula> <tex-math notation="LaTeX">$422 ~\mu \text{A}/\mu \text{m}$ </tex-math></inline-formula> and a retention time of 120 ms at <inline-formula> <tex-math notation="LaTeX">$T$ </tex-math></inline-formula> &#x003D; 358 K.https://ieeexplore.ieee.org/document/9641815/Polycrystalline siliconone-transistor dynamic random-access memorygrain boundarynanotubemetal–oxide–semiconductor field-effect transistordual-gate
spellingShingle Jin Park
Min Su Cho
Sang Ho Lee
Hee Dae An
So Ra Min
Geon Uk Kim
Young Jun Yoon
Jae Hwa Seo
Sin-Hyung Lee
Jaewon Jang
Jin-Hyuk Bae
In Man Kang
Design of Capacitorless DRAM Based on Polycrystalline Silicon Nanotube Structure
IEEE Access
Polycrystalline silicon
one-transistor dynamic random-access memory
grain boundary
nanotube
metal–oxide–semiconductor field-effect transistor
dual-gate
title Design of Capacitorless DRAM Based on Polycrystalline Silicon Nanotube Structure
title_full Design of Capacitorless DRAM Based on Polycrystalline Silicon Nanotube Structure
title_fullStr Design of Capacitorless DRAM Based on Polycrystalline Silicon Nanotube Structure
title_full_unstemmed Design of Capacitorless DRAM Based on Polycrystalline Silicon Nanotube Structure
title_short Design of Capacitorless DRAM Based on Polycrystalline Silicon Nanotube Structure
title_sort design of capacitorless dram based on polycrystalline silicon nanotube structure
topic Polycrystalline silicon
one-transistor dynamic random-access memory
grain boundary
nanotube
metal–oxide–semiconductor field-effect transistor
dual-gate
url https://ieeexplore.ieee.org/document/9641815/
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