A Study of Ammonium Bifluoride as an Agent for Cleaning Silicon Contamination in the Wafer Dicing Process
A new cleaning agent for silicon contamination in the wafer dicing process was formulated in this research. Ammonium bifluoride was introduced as the main ingredient in the formula, and MSA and sulfuric acid were added as the solvent and buffer solution against metal corrosion. It was confirmed that...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-04-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/13/9/5294 |