Design of MEMS capacitive comb accelerometer with perforated proof mass for seismic applications

Design of MEMS capacitive comb accelerometer with perforated proof mass for seismic applications

Micro Electro Mechanical System (MEMS) sensors are characterized by their small size, but their performances exceed that of their macro-scale counterparts. The small size of MEMS devices and their integration with microelectronics proves a major advantage. In this paper, a design of MEMS capacitive...

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Bibliographic Details
Main Authors: Ghada Ahmed Khouqeer, S. Suganthi, Nadyah Alanazi, Abdullah Alodhayb, Muthumareeswaran Muthuramamoorthy, Saravanan Pandiaraj
Format: Article
Language:English
Published: Elsevier 2023-04-01
Series:Journal of King Saud University: Science
Subjects:
Environmental quantity
MEMS
Sensors
Accelerometer
Seismology
Perforated mass
Online Access:http://www.sciencedirect.com/science/article/pii/S1018364723000228

Internet

http://www.sciencedirect.com/science/article/pii/S1018364723000228

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