STUDY OF SOME SURFACE DEFECTS FOR SINGLE CRYSTAL SILICON WAFER
The single crystal of semiconductor no longer be perfect, but contains some defect in the structure and surface of twining, lineage structure, grain boundaries. Search included the adoption of technical betting that chemical and microscopic tests to determine defects on the surface of silicon wafer...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
University of Anbar
2013-11-01
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| Series: | مجلة جامعة الانبار للعلوم الصرفة |
| Online Access: | https://juaps.uoanbar.edu.iq/article_83053_bf5aa5ac39f8b5f95562bbb92232a59b.pdf |