Formation of Nano-Fibrous Patterns on Aluminum Substrates via Photolithographic Fabrication of Electrospun Photosensitive Polyimide Fibrous Membranes
The formation of polymeric micro-patterns on various substrates via a photolithography procedure has been widely used in semiconductor fabrication. Standard polymer patterns are usually fabricated via photosensitive polymer varnishes, in which large amounts of potentially harmful solvents with weigh...
| Main Authors: | , , , , , , , , , |
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| 格式: | Article |
| 語言: | English |
| 出版: |
MDPI AG
2022-08-01
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| 叢編: | Nanomaterials |
| 主題: | |
| 在線閱讀: | https://www.mdpi.com/2079-4991/12/16/2745 |