Fabrication Technology and Characteristics Research of the Acceleration Sensor Based on Li-Doped ZnO Piezoelectric Thin Films

Fabrication Technology and Characteristics Research of the Acceleration Sensor Based on Li-Doped ZnO Piezoelectric Thin Films

An acceleration sensor based on piezoelectric thin films is proposed in this paper, which comprises the elastic element of a silicon cantilever beam and a piezoelectric structure with Li-doped ZnO piezoelectric thin films. The Li-doped ZnO piezoelectric thin films were prepared on SiO2/Si by radio f...

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Bibliographic Details
Main Authors: Sen Li, Xiaofeng Zhao, Yinan Bai, Yi Li, Chunpeng Ai, Dianzhong Wen
Format: Article
Language:English
Published: MDPI AG 2018-04-01
Series:Micromachines
Subjects:
acceleration sensor
piezoelectric thin films
Li-doped ZnO thin films
MEMS technology
Online Access:http://www.mdpi.com/2072-666X/9/4/178

Internet

http://www.mdpi.com/2072-666X/9/4/178

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