Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer

Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer

Electrostatic suspended accelerometers (ESAs) are widely used in high accuracy acceleration measurement. However, there exist accumulated charges on the isolated mass which damage the accuracy and the stability of ESAs. In this paper, we propose to apply actuation voltage with a combined waveform to...

Full description

Bibliographic Details
Main Authors: Jiefeng Dai, Wenrui Wang, Bin Wu, Lingyun Ye, Kaichen Song
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Sensors
Subjects:
charge accumulation
electrostatic suspended accelerometer
charge noise
combined waveform
acceleration noise suppression
Online Access:https://www.mdpi.com/1424-8220/22/13/4930

Internet

https://www.mdpi.com/1424-8220/22/13/4930

Similar Items