Fundamentals and applications of spectroscopic ellipsometry
This paper describes the use of ellipsometry as a precise and accurate technique for characterizing substrates and overlayers. A brief historical development of ellipsometry and the basic principles necessary to understand how an ellipsometer works are presented. There are many examples of studies p...
| 主要な著者: | , |
|---|---|
| フォーマット: | 論文 |
| 言語: | English |
| 出版事項: |
Sociedade Brasileira de Química
2002-09-01
|
| シリーズ: | Química Nova |
| 主題: | |
| オンライン･アクセス: | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S0100-40422002000500015 |