Research trends in methods for controlling macro-micro motion platforms
With ongoing economic, scientific, and technological developments, the electronic devices used in daily lives are developing toward precision and miniaturization, and so the demand for high-precision manufacturing machinery is expanding. The most important piece of equipment in modern high-precision...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-09-01
|
| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://dx.doi.org/10.1063/10.0019384 |