Research trends in methods for controlling macro-micro motion platforms
With ongoing economic, scientific, and technological developments, the electronic devices used in daily lives are developing toward precision and miniaturization, and so the demand for high-precision manufacturing machinery is expanding. The most important piece of equipment in modern high-precision...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-09-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://dx.doi.org/10.1063/10.0019384 |
| _version_ | 1827822617911885824 |
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| author | Lufan Zhang Pengqi Zhang Boshi Jiang Heng Yan |
| author_facet | Lufan Zhang Pengqi Zhang Boshi Jiang Heng Yan |
| author_sort | Lufan Zhang |
| collection | DOAJ |
| description | With ongoing economic, scientific, and technological developments, the electronic devices used in daily lives are developing toward precision and miniaturization, and so the demand for high-precision manufacturing machinery is expanding. The most important piece of equipment in modern high-precision manufacturing is the macro-micro motion platform (M3P), which offers high speed, precision, and efficiency and has macro-micro motion coupling characteristics due to its mechanical design and composition of its driving components. Therefore, the design of the control system is crucial for the overall precision of the platform; conventional proportional–integral–derivative control cannot meet the system requirements, and so M3Ps are the subject of a growing range of modern control strategies. This paper begins by describing the development history of M3Ps, followed by their platform structure and motion control system components, and then in-depth assessments of the macro, micro, and macro-micro control systems. In addition to examining the advantages and disadvantages of current macro-micro motion control, recent technological breakthroughs are noted. Finally, based on existing problems, future directions for M3P control systems are given, and the present conclusions offer guidelines for future work on M3Ps. |
| first_indexed | 2024-03-12T02:00:12Z |
| format | Article |
| id | doaj.art-5e938dda7b0341adb1c0c40b76e7b8d1 |
| institution | Directory Open Access Journal |
| issn | 2589-5540 |
| language | English |
| last_indexed | 2024-03-12T02:00:12Z |
| publishDate | 2023-09-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | Nanotechnology and Precision Engineering |
| spelling | doaj.art-5e938dda7b0341adb1c0c40b76e7b8d12023-09-07T18:53:15ZengAIP Publishing LLCNanotechnology and Precision Engineering2589-55402023-09-0163035001035001-1510.1063/10.0019384Research trends in methods for controlling macro-micro motion platformsLufan Zhang0Pengqi Zhang1Boshi Jiang2Heng Yan3College of Mechanical and Electrical Engineering, Henan University of Technology, Zhengzhou 450001, ChinaCollege of Mechanical and Electrical Engineering, Henan University of Technology, Zhengzhou 450001, ChinaCollege of Mechanical and Electrical Engineering, Henan University of Technology, Zhengzhou 450001, ChinaCollege of Mechanical and Electrical Engineering, Henan University of Technology, Zhengzhou 450001, ChinaWith ongoing economic, scientific, and technological developments, the electronic devices used in daily lives are developing toward precision and miniaturization, and so the demand for high-precision manufacturing machinery is expanding. The most important piece of equipment in modern high-precision manufacturing is the macro-micro motion platform (M3P), which offers high speed, precision, and efficiency and has macro-micro motion coupling characteristics due to its mechanical design and composition of its driving components. Therefore, the design of the control system is crucial for the overall precision of the platform; conventional proportional–integral–derivative control cannot meet the system requirements, and so M3Ps are the subject of a growing range of modern control strategies. This paper begins by describing the development history of M3Ps, followed by their platform structure and motion control system components, and then in-depth assessments of the macro, micro, and macro-micro control systems. In addition to examining the advantages and disadvantages of current macro-micro motion control, recent technological breakthroughs are noted. Finally, based on existing problems, future directions for M3P control systems are given, and the present conclusions offer guidelines for future work on M3Ps.http://dx.doi.org/10.1063/10.0019384 |
| spellingShingle | Lufan Zhang Pengqi Zhang Boshi Jiang Heng Yan Research trends in methods for controlling macro-micro motion platforms Nanotechnology and Precision Engineering |
| title | Research trends in methods for controlling macro-micro motion platforms |
| title_full | Research trends in methods for controlling macro-micro motion platforms |
| title_fullStr | Research trends in methods for controlling macro-micro motion platforms |
| title_full_unstemmed | Research trends in methods for controlling macro-micro motion platforms |
| title_short | Research trends in methods for controlling macro-micro motion platforms |
| title_sort | research trends in methods for controlling macro micro motion platforms |
| url | http://dx.doi.org/10.1063/10.0019384 |
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