Research trends in methods for controlling macro-micro motion platforms
With ongoing economic, scientific, and technological developments, the electronic devices used in daily lives are developing toward precision and miniaturization, and so the demand for high-precision manufacturing machinery is expanding. The most important piece of equipment in modern high-precision...
| Autori principali: | , , , |
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| Natura: | Articolo |
| Lingua: | English |
| Pubblicazione: |
AIP Publishing LLC
2023-09-01
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| Serie: | Nanotechnology and Precision Engineering |
| Accesso online: | http://dx.doi.org/10.1063/10.0019384 |