Investigation of Physical Properties and Electrochemical Behavior of Nitrogen-Doped Diamond-Like Carbon Thin Films

This work reports characterizations of diamond-like carbon (DLC) films used as electrodes for electrochemical applications. DLC thin films are prepared on glass slides and silicon substrates by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) using a gas mixture of methane and hy...

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Bibliographic Details
Main Authors: Rattanakorn Saensak, Napat Triroj
Format: Article
Language:English
Published: Khon Kaen University 2014-03-01
Series:KKU Engineering Journal
Subjects:
Online Access:https://www.tci-thaijo.org/index.php/kkuenj/article/download/21762/18773