Investigation of Physical Properties and Electrochemical Behavior of Nitrogen-Doped Diamond-Like Carbon Thin Films
This work reports characterizations of diamond-like carbon (DLC) films used as electrodes for electrochemical applications. DLC thin films are prepared on glass slides and silicon substrates by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) using a gas mixture of methane and hy...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Khon Kaen University
2014-03-01
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Series: | KKU Engineering Journal |
Subjects: | |
Online Access: | https://www.tci-thaijo.org/index.php/kkuenj/article/download/21762/18773 |