Precise Focal Spot Positioning on an Opaque Substrate Based on the Diffraction Phenomenon in Laser Microfabrication

Precise Focal Spot Positioning on an Opaque Substrate Based on the Diffraction Phenomenon in Laser Microfabrication

The precise positioning of the laser focal spot on the substrate is an important issue for laser microfabrication. In this work, a diffraction pattern-based focal spot positioning method (DFSPM) is proposed to achieve the precise positioning of the laser focal spot on opaque substrates. A series of...

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Bibliographic Details
Main Authors: Xian Jing, Pengju Zhao, Fuzeng Wang, Mingkun Han, Jieqiong Lin
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Micromachines
Subjects:
two-photon lithography
focal spot positioning
laser microfabrication
diffraction patterns
opaque substrate
Online Access:https://www.mdpi.com/2072-666X/14/12/2256

Internet

https://www.mdpi.com/2072-666X/14/12/2256

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