A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision
We present a prototype of a simple, low-cost setup for a fast scatterometric surface texture measurements. We used a total integrated scatter method (TIS) with a semiconductor laser (λ = 638 nm) and a Si photodiode. Using our setup, we estimated the roughness parameters Rq for two reference surface...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Polish Academy of Sciences
2020-06-01
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| Series: | Bulletin of the Polish Academy of Sciences: Technical Sciences |
| Subjects: | |
| Online Access: | https://journals.pan.pl/Content/116520/PDF/10_485-490_01475_Bpast.No.68-3_30.06.20_K3A_TeX.pdf |