Energy-Efficient Annealing Process of Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Capacitor Using Ultraviolet-LED for Green Manufacturing

Energy-Efficient Annealing Process of Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Capacitor Using Ultraviolet-LED for Green Manufacturing

Thermal annealing process plays an important role in the formation of ferroelectric phase in Hf0.5Zr0.5O2 (HZO) thin films. In this study, the annealing process of the HZO capacitors is demonstrated using ultraviolet (UV)-LED, for the first time. Since the absorptance of the HZO films with TiN elect...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριοι συγγραφείς: Hirotaka Yamada, Satoru Furue, Takehiko Yokomori, Yuki Itoya, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi
Μορφή: Άρθρο
Γλώσσα:English
Έκδοση: IEEE 2024-01-01
Σειρά:IEEE Journal of the Electron Devices Society
Θέματα:
HZO
LED anneal
energy efficiency
Διαθέσιμο Online:https://ieeexplore.ieee.org/document/10433786/

Διαδίκτυο

https://ieeexplore.ieee.org/document/10433786/

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