Static and Motional Feedthrough Capacitance of Flexural Microresonator
The present paper evaluates the static and motional feedthrough capacitance of a silicon carbide-based flexural-mode microelectromechanical system resonator. The static feedthrough capacitance was measured by a network analyzer under atmospheric pressure. The motional feedthrough was obtained by int...
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| Format: | Article |
| Language: | English |
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Hindawi Limited
2011-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/2011/546986 |