Impact of Helium Ion Implantation Dose and Annealing on Dense Near-Surface Layers of NV Centers

Impact of Helium Ion Implantation Dose and Annealing on Dense Near-Surface Layers of NV Centers

The implantation of diamonds with helium ions has become a common method to create hundreds-nanometers-thick near-surface layers of NV centers for high-sensitivity sensing and imaging applications; however, optimal implantation dose and annealing temperature are still a matter of discussion. In this...

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Bibliographic Details
Main Authors: Andris Berzins, Hugo Grube, Einars Sprugis, Guntars Vaivars, Ilja Fescenko
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Nanomaterials
Subjects:
nitrogen-vacancy centers
He ion implantation
diamond annealing
dense NV layers
Online Access:https://www.mdpi.com/2079-4991/12/13/2234

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https://www.mdpi.com/2079-4991/12/13/2234

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