Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser

Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser

Femtosecond (fs) laser processing has received great attention for preparing novel micro-nano structures and functional materials. However, the induction mechanism of the micro-nano structures induced by fs lasers still needs to be explored. In this work, the laser-induced periodic surface structure...

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Bibliographic Details
Main Authors: Yanan Liu, Ye Ding, Jichang Xie, Mingjun Chen, Lijun Yang, Xun Lv, Julong Yuan
Format: Article
Language:English
Published: MDPI AG 2022-07-01
Series:Materials
Subjects:
femtosecond laser
monocrystalline silicon
laser-induced periodic surface structure
micro-nano structure
Online Access:https://www.mdpi.com/1996-1944/15/14/4897

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https://www.mdpi.com/1996-1944/15/14/4897

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