Improving the Consistency of Nanoscale Etching for Atomic Force Microscopy Tomography Applications

Improving the Consistency of Nanoscale Etching for Atomic Force Microscopy Tomography Applications

The atomic force microscope (AFM) empowers research into nanoscale structural and functional material properties. Recently, the scope of application has broadened with the arrival of conductance tomography, a technique for mapping current in three-dimensions in electronic devices by gradually removi...

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Bibliographic Details
Main Authors: Mark Buckwell, Wing H. Ng, Stephen Hudziak, Adnan Mehonic, Mario Lanza, Anthony J. Kenyon
Format: Article
Language:English
Published: Frontiers Media S.A. 2019-08-01
Series:Frontiers in Materials
Subjects:
atomic force microscopy
tomography
etching
lithography
machining
scratching
Online Access:https://www.frontiersin.org/article/10.3389/fmats.2019.00203/full

Internet

https://www.frontiersin.org/article/10.3389/fmats.2019.00203/full

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