Structural Design and Testing of a Micromechanical Resonant Accelerometer
Micromechanical resonant accelerometers based on electrostatic stiffness have the advantage of it being possible to adjust their sensitivity by changing the detection voltage. However, there is a high-order nonlinear relationship between the output frequency and the induced acceleration, so it is di...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/8/1271 |