Structural Design and Testing of a Micromechanical Resonant Accelerometer
Micromechanical resonant accelerometers based on electrostatic stiffness have the advantage of it being possible to adjust their sensitivity by changing the detection voltage. However, there is a high-order nonlinear relationship between the output frequency and the induced acceleration, so it is di...
| Hauptverfasser: | , , |
|---|---|
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
MDPI AG
2022-08-01
|
| Schriftenreihe: | Micromachines |
| Schlagworte: | |
| Online Zugang: | https://www.mdpi.com/2072-666X/13/8/1271 |