The growth of large-sized graphene domains by Faraday cage-assisted plasma enhanced chemical vapor deposition

The growth of large-sized graphene domains by Faraday cage-assisted plasma enhanced chemical vapor deposition

Plasma enhanced chemical vapor deposition (PECVD) is considered one of the methods to synthesize graphene with the greatest development potential due to its advantages to operate in low temperatures with high efficiency. However, unlike thermal chemical vapor deposition (TCVD), graphene grown by PEC...

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Bibliographic Details
Main Authors: Na Li, Zhen Zhen, Zhenhua Xu, Rujing Zhang, Rende Mu, Limin He
Format: Article
Language:English
Published: Elsevier 2021-12-01
Series:Applied Surface Science Advances
Subjects:
Graphene
PECVD
Nucleation and growth of graphene
Faraday-cage
The current carrier mobility
Online Access:http://www.sciencedirect.com/science/article/pii/S2666523921001008

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http://www.sciencedirect.com/science/article/pii/S2666523921001008

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