The growth of large-sized graphene domains by Faraday cage-assisted plasma enhanced chemical vapor deposition
Plasma enhanced chemical vapor deposition (PECVD) is considered one of the methods to synthesize graphene with the greatest development potential due to its advantages to operate in low temperatures with high efficiency. However, unlike thermal chemical vapor deposition (TCVD), graphene grown by PEC...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
|
| Series: | Applied Surface Science Advances |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523921001008 |
| _version_ | 1830162453785214976 |
|---|---|
| author | Na Li Zhen Zhen Zhenhua Xu Rujing Zhang Rende Mu Limin He |
| author_facet | Na Li Zhen Zhen Zhenhua Xu Rujing Zhang Rende Mu Limin He |
| author_sort | Na Li |
| collection | DOAJ |
| description | Plasma enhanced chemical vapor deposition (PECVD) is considered one of the methods to synthesize graphene with the greatest development potential due to its advantages to operate in low temperatures with high efficiency. However, unlike thermal chemical vapor deposition (TCVD), graphene grown by PECVD usually has smaller grain size with higher nucleation density of graphene films, in which excessive grain boundaries would lead to unsatisfactory electric performance for practical applications. One of the challenges in preparing graphene by PECVD is to improve the quality of graphene by controlling the nucleation and growth of graphene. In this article, the optimal growth of graphene in a Faraday cage by PECVD was studied. The nucleation density and growth rate of graphene in PECVD were decreased significantly with a Faraday cage. Large-sized graphene grains(∼20 µm) were successfully synthesized on polycrystalline copper by rising the growth temperature in the Faraday cage, and showed high quality. Besides, the graphene grown in a Faraday cage exhibits an average current carrier mobility of 309.1 cm2V−1s−1 under room temperature. |
| first_indexed | 2024-12-17T15:20:28Z |
| format | Article |
| id | doaj.art-5ffacd159abe42d4ae0f6e6c6c2c8614 |
| institution | Directory Open Access Journal |
| issn | 2666-5239 |
| language | English |
| last_indexed | 2024-12-17T15:20:28Z |
| publishDate | 2021-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Applied Surface Science Advances |
| spelling | doaj.art-5ffacd159abe42d4ae0f6e6c6c2c86142022-12-21T21:43:25ZengElsevierApplied Surface Science Advances2666-52392021-12-016100154The growth of large-sized graphene domains by Faraday cage-assisted plasma enhanced chemical vapor depositionNa Li0Zhen Zhen1Zhenhua Xu2Rujing Zhang3Rende Mu4Limin He5Key Laboratory of Advanced Corrosion and Protection for Aviation Materials, Beijing Institute of Aeronautical Materials, Aero Engine Corporation of China, Beijing 10095, China; Beijing institute of graphene technology, ChinaKey Laboratory of Advanced Corrosion and Protection for Aviation Materials, Beijing Institute of Aeronautical Materials, Aero Engine Corporation of China, Beijing 10095, China; Beijing institute of graphene technology, ChinaKey Laboratory of Advanced Corrosion and Protection for Aviation Materials, Beijing Institute of Aeronautical Materials, Aero Engine Corporation of China, Beijing 10095, China; Beijing institute of graphene technology, ChinaKey Laboratory of Advanced Corrosion and Protection for Aviation Materials, Beijing Institute of Aeronautical Materials, Aero Engine Corporation of China, Beijing 10095, China; Beijing institute of graphene technology, ChinaKey Laboratory of Advanced Corrosion and Protection for Aviation Materials, Beijing Institute of Aeronautical Materials, Aero Engine Corporation of China, Beijing 10095, ChinaKey Laboratory of Advanced Corrosion and Protection for Aviation Materials, Beijing Institute of Aeronautical Materials, Aero Engine Corporation of China, Beijing 10095, China; Beijing institute of graphene technology, China; Corresponding author at: Key Laboratory of Advanced Corrosion and Protection for Aviation Materials, Beijing Institute of Aeronautical Materials, Aero Engine Corporation of China, Beijing 10095, China.Plasma enhanced chemical vapor deposition (PECVD) is considered one of the methods to synthesize graphene with the greatest development potential due to its advantages to operate in low temperatures with high efficiency. However, unlike thermal chemical vapor deposition (TCVD), graphene grown by PECVD usually has smaller grain size with higher nucleation density of graphene films, in which excessive grain boundaries would lead to unsatisfactory electric performance for practical applications. One of the challenges in preparing graphene by PECVD is to improve the quality of graphene by controlling the nucleation and growth of graphene. In this article, the optimal growth of graphene in a Faraday cage by PECVD was studied. The nucleation density and growth rate of graphene in PECVD were decreased significantly with a Faraday cage. Large-sized graphene grains(∼20 µm) were successfully synthesized on polycrystalline copper by rising the growth temperature in the Faraday cage, and showed high quality. Besides, the graphene grown in a Faraday cage exhibits an average current carrier mobility of 309.1 cm2V−1s−1 under room temperature.http://www.sciencedirect.com/science/article/pii/S2666523921001008GraphenePECVDNucleation and growth of grapheneFaraday-cageThe current carrier mobility |
| spellingShingle | Na Li Zhen Zhen Zhenhua Xu Rujing Zhang Rende Mu Limin He The growth of large-sized graphene domains by Faraday cage-assisted plasma enhanced chemical vapor deposition Applied Surface Science Advances Graphene PECVD Nucleation and growth of graphene Faraday-cage The current carrier mobility |
| title | The growth of large-sized graphene domains by Faraday cage-assisted plasma enhanced chemical vapor deposition |
| title_full | The growth of large-sized graphene domains by Faraday cage-assisted plasma enhanced chemical vapor deposition |
| title_fullStr | The growth of large-sized graphene domains by Faraday cage-assisted plasma enhanced chemical vapor deposition |
| title_full_unstemmed | The growth of large-sized graphene domains by Faraday cage-assisted plasma enhanced chemical vapor deposition |
| title_short | The growth of large-sized graphene domains by Faraday cage-assisted plasma enhanced chemical vapor deposition |
| title_sort | growth of large sized graphene domains by faraday cage assisted plasma enhanced chemical vapor deposition |
| topic | Graphene PECVD Nucleation and growth of graphene Faraday-cage The current carrier mobility |
| url | http://www.sciencedirect.com/science/article/pii/S2666523921001008 |
| work_keys_str_mv | AT nali thegrowthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition AT zhenzhen thegrowthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition AT zhenhuaxu thegrowthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition AT rujingzhang thegrowthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition AT rendemu thegrowthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition AT liminhe thegrowthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition AT nali growthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition AT zhenzhen growthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition AT zhenhuaxu growthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition AT rujingzhang growthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition AT rendemu growthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition AT liminhe growthoflargesizedgraphenedomainsbyfaradaycageassistedplasmaenhancedchemicalvapordeposition |